MSc Micro- and Nanotechnologies at Ilmenau University of Technology

Programme overview

Interdisciplinary English-taught programme linking natural science foundations with engineering application in micro- and nanotechnologies, aimed at applications in microelectronics, energy conversion, communication technology and biotechnology. It is designed for graduates of electrical engineering and information technology or closely related engineering programmes with a specialisation in micro- and nanotechnology or microsystems technology.

Faculty: Faculty of Electrical Engineering and Information Technology | Duration: 4 semesters (2 years), 120 credit points | Study mode: full-time; English-taught | Intake: Winter semester (1 October) | Location: Ilmenau, Thüringen, Germany

What you will study

Compulsory courses (for example electronics technology, semiconductor devices, materials of micro- and nanotechnologies, nanodiagnostics, nanotechnology, microtechnologies, laboratory for materials and micro-/nanofabrication), advanced elective courses (for example MEMS, micro- and nanosensors, 3D materials analysis, functional materials, thin films and surfaces), introduction to project work and soft skills, a project with seminar, technical electives from other master's curricula and the master's thesis.

Career pathways

Fields include microelectronics, microsystems and nanotechnology, sensor technology, measurement technology, industrial electronics, energy technology, information electronics and medical technology.

Official programme page

Application information

Entry requirements

Numerus clausus: none (NC-free). Special admission requirements: at least 60 points from three categories: (A) relevance of the Bachelor's degree, with competences in electrical engineering fundamentals, materials engineering fundamentals, higher mathematics, physics and mechanics (maximum 40 points); (B) degree grade (maximum 30 points; German grade 1.0 to 1.5 gives 30, 1.6 to 2.0 gives 20, 2.1 to 2.5 gives 10); (C) study achievements (maximum 20 points: good or very good grades in electrical engineering fundamentals, physics and materials engineering, and a good or very good thesis or one year of related work experience, 5 points each). Language of instruction is English. Direct admission requires English at CEFR level C1; CEFR level B2 is the minimum for conditional admission to preparatory courses. Applications of international students for the winter semester 2027/28 open on 16 January 2027 through uni-assist. Application windows (winter semester only): 16 April to 15 September with German certificates; 16 January to 15 September with EU/EEA certificates; 16 January to 15 May with non-EU certificates.

Intake: Winter semester (1 October)

Duration: 4 semesters (2 years), 120 credit points

Apply through the official page: https://www.tu-ilmenau.de/studium/vor-dem-studium/studienangebot/bewerbung

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